Spin coating is a well-established technique that enables uniform deposition of thin films to be deposited precisely onto a wide range of substrates. With substrates supported on a chuck, they utilise centrifugal force, generated by the high-speed rotation of the substrate, to spread a dispensed liquid coating material into a thin, even layer. This ability to create precise and reproducible films at the nanoscale makes it an invaluable tool for researchers and engineers across various disciplines.
Spin coating is used in a wide number of sectors, including:
- Microelectronics: Coating circuit boards, transistors, and other electronic components with functional materials
- Photonics: Fabricating optical lenses, filters, and waveguides for light manipulation
- Biotechnology: Creating biosensors, microfluidic devices, and drug delivery systems
- Materials Science: Studying the properties of thin films and nanostructures
Benefits include:
- Exceptional Uniformity: Spin coating produces highly even and reproducible film thicknesses across the substrate surface, crucial for many applications
- Precise Control: Film thickness can be accurately tailored by adjusting the spinning speed, time, and solution properties
- Thin-Film Capability: Spin coating allows the depositing of ultra-thin films, down to a few nanometres, which is hard to achieve using other methods
- Material Versatility: A wide range of materials, from polymers and metals to semiconductors and biomolecules, can be deposited using spin coating
PI-KEM supplies spin coaters on behalf of MTI Corporation, Navson, and Specialty Coating Systems (SCS) offering a range of equipment suitable for different budgets and applications. We also offer a full range of chucks for all of these models, engineered in a variety of materials to suit the coatings being dispensed and sizes & designs to suit the substrates being coated.
Spin coater model selection is dependent on your specific needs and budget. Factors to consider are:
- Substrate size and type
- Desired film thickness and uniformity
- Required spin speeds and processing time
- Need for automation or advanced features
- Budget constraints
- Frequency of use
Contact our Energy Research and Material Processing Team, who are available to advise on the best model of spin coater and chuck design for your application.
Spincoater Options
- Up to 15" bowl
- Teflon coated bowls
- Speed up to 10,000 rpm
- Automatic or manual dispensing
- Single step or multi-step programmable
- Vacuum or non-vacuum supported chucks
- Glovebox options
- Remote control options
- Purge function can be disabled
- Pumps and compressor available, click here for dedicated page
Chuck Options
- Circular, rectangular or square
- With or without vacuum
- Grooved or non-grooved
- Pins, fingers, recessed options for additional support
- Porous
- Stainless steel, aluminium, delrin with or without O-rings
- Off-stock and custom designs available
Our Energy Research and Material Processing Team will guide you through your chuck selection. Our Managing Director, Colin Rouse has written an Insight article about chuck selection, click here to read.
Navson
Navson offer the NT12000 and the NTCR8.
NTC1200
- Maximum speed of 12 000rpm
- Max 10 step programme
- Program duration of 1000 seconds
- Programme storage either on device or via pen drive
- Up to 4" diameter wafers
- Optional IR heating module and UV curer
- Glove box options
- Includes standard chuck for microscope slide and 2" wafer
- Touch screen
- Metal casing
Click here to read more
NTCR8
- Maximum speed of 12 000rpm
- Max 10 step programme
- Program duration of 1000 seconds per step
- Programme storage on device
- Up to 9" diameter wafers
- Polypropylene casing and chuck
- Touch screen
- Safety interlock
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Click here to read more
SCS
SCS offer two ranges of spin coaters for both research and QC applications.
6800 Series
The SCS 6800 Spin Coater series enables R&D and university laboratories to efficiently and accurately develop and refine coating applications. Its proprietary circuitry and user-friendly operation allow for the uniform application of photoresists, polyimides, metal-organics, dopants, silica films and most organic and aqueous solutions to planar substrates.
- Precise control of spin speed and acceleration/deceleration rates
- Easy-to-use three-button keypad and LCD display on the front panel
- PVC cover features a dispensing slot and safety interlock to prevent operation when the cover is removed
- A modern lid sensor to increase reliability
- Available with an 8 inch or 12 inch PTFE-coated bowl
- Stores and executes up to 3 recipes with 8 steps each
- Up to 9,999rpm rotational speed
- Max wafer diameter of 6" or 10" programmable
- Requires external vacuum pump and compressor
- Optional foot pedal
- Optional external vacuum pump
Click here to read more
G4 Series
The SCS G4 Spin Coater series sets the standard in operating precision and programming flexibility, with a high level of rotation accuracy and repeatability along with precise acceleration and deceleration control. The G4 series accurately applies liquid coating materials such as photoresists, polyimides, metallo-organics, dopants and silica films on planar substrates. Fully programmable G4 Spin Coaters can store and execute up to 30 programs with 20 steps each, providing excellent flexibility. Designed with user convenience in mind, the spin coaters feature a removable touchscreen, making them ideal for use in fume hoods and glove box configurations.
- Fully programmable
- Available with 8" or 12" PTFE coated bowl sizes
- Removable Touch Screen tethered with 6-foot cable
- Up to 9,999rpm
- Requires external vacuum pump and compressor
- Stores and executes up to 30 programs, with up to 20 steps each providing excellent flexibility
- Precise repeatability from cycle to cycle
- Closed-loop servomotor for precise speed regulation
- Spin profiles adjustable in 1.0 rpm rotation increments, 0.1 second timing increments, and 0.1 second increments for dwell time
- Compact enclosure size
- Rear bowl drain port
- Interlocking hinged cover
- Tempered glass or impact-resistant PVC lid
- Optional Foot Pedal, Bluetooth communication, Fume exhaust adaptor, Manual Dispense, Automated Dispense
Click here to read more
Multi-dispense System
The SCS Multi-Dispense enables you to dispense liquid materials when connected to the SCS G4 Spin Coater from up to four different dispense modules (three with the use of N2). Materials can include coatings, solvents and cleaning solutions, in addition to the N2, which can be used for blow-off or drying. By including the SCS Multi-Dispense system, users can eliminate the need for time-consuming cleaning and change-over, while providing the accurate and controlled coatings capabilities backed by SCS and our years of coatings expertise.
Click here to read more
