Sputtering, close-spaced sublimation (CSS), and thermal coating are three widely used thin-film deposition techniques that create thin, uniform layers of material on various substrates.
These coatings have a wide range of applications in various industries:
- Electronics: To deposit thin films on various electronic devices, such as integrated circuits, displays, and solar cells. The deposited films can provide electrical insulation, heat dissipation, and optical properties
- Aerospace: Sputtered films are used to protect aerospace components from wear, corrosion, and erosion. CSS and thermal coatings are used to deposit optical coatings on lenses and mirrors for space telescopes and other applications
- Medical Devices: Sputtered films are used to deposit coatings with biocompatible properties on medical implants and devices. CSS and thermal coatings are used to deposit drug delivery and sensing films on implantable devices
PI-KEM is proud to distribute a wide range of coaters on behalf of Vision Precision Instruments (VPI) and MTI Corporation.
VPI Coaters
VPI offer two coating options: magnetron sputtering, and evaporative carbon coaters.
Magnetron Coater
- Magnetron size from 50mm * 0.1mm, to 50mm * 3mm
- Custom option up to 200mm
- Chamber size range from 150mm * 120mm to 260mm * 200mm
- Requires a vacuum pump
- Benchtop
- Customisable for glove box uses
- Dual Head option available for special order
Options:
- Standard magnetron coater: For coating non-conductive and heat resistant samples for SEM or for surface treating samples
- High Vacuum magnetron coater: Provides a stable sputtering environment and DC and RF power options, allowing sputtering of conductive or non-conductive samples. Improves PVD performance and can be used for surface treating samples
- Ion Vacuum magnetron coater: For coating non-conductive SEM samples for improved imaging and can be used for surface treating samples. Generates less heat than the standard and high vacuum models. Options available with or without gas flow control
Evaporation Carbon Coater
- Apply a thin layer of conductive carbon film to sample surface
- In a non-conductive sample this can prepare the sample for SEM analysis
- Pulse mode and high vacuum thermal options
- Benchtop
- Requires a vacuum pump
- Chamber size: 150mm * 120mm
- Target source: Carbon rope
- Three target ion coaters available for special order
Also available:
- Combined package of magnetron sputtering and evaporation coater
- Replacement magnetron heads, stages, and sputtering heads
Click here for detailed VPI product information
MTI Coaters
MTI offer two coating options: magnetron sputtering, and CSS (Close Spaced Sublimation)/ thermal evaporation.
Magnetron Coater
- Magnetron size from 1” to 2”
- Chamber size range from 150mm * 250mm to 300mm * 300mm
- Requires a vacuum pump
- DC/RF power options
- Benchtop
- Glovebox options available
Options:
- Compact magnetron coater: Options for use with noble metals, and combined metallic and non-conductive materials
- High power plasma magnetron coater: Coating up to 4” metallic films. Includes water chiller and sample holder
- Three head plasma sputter coater: For non-metallic thin film coating, primarily multilayer oxides. Can have any combination of RF and DC heads
- Dual head high vacuum sputter coater: For metallic and non-metallic coating dependent on head configuration. Designed for coating both single and multiple film layers for a wide range of materials, including alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, and PTFE
Also available:
- Hybrid PVD/ CVD Coater
Click here for detailed MTI product information
CSS and Thermal Evaporation Coaters
- Chamber size range from 150mm * 250mm to 280mm * 260mm
- Sample stage 50mm to 300mm
- Automatic and programmable temperature control
- Benchtop and floor standing
- Single or up to four sources
- Glovebox options available
- Single or multi zone heating
- Tungsten coil heater and crucibles
- Glovebox compatible options
- For coating metallic or organic samples and wafers; Or annealing thin films and semiconductor
Also available:
- Hybrid PVD coater in glovebox
- Evaporation coater in glovebox
- Components to construct own coater
Click here for CSS and thermal evaporation and here for standard vacuum chamber and sputtering source
Consumables and accessories available, click here
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